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- Mask Aligner Machine
| Brand | Midas |
| Model Number | MDA-60MS |
| Substrate Size | 6" (150mm) |
| Light Source | 1000W UV Lamp |
| Mask Size | 7" x 7" |
| Substrate Size | 6" x 6" |
| Uniform Beam Size | 7.25" x 7.25" |
| Beam Uniformity | +/-5% |
| Beam Wavelength | 350 - 450nm |
| Intensity | 15 - 25mW/cm2 |
| Alignment Accuracy | 1um |
| Dimensions | 1400 (W) x 1100 (D) x 1600 (H) mm |
| Weight | 650 kg |
The MDA-60MS is designed for research organizations who want to work with a state of the art technology mask aligner. This highly accurate system allows researchers to easily develop their processes on either small substrate pieces or wafers up to 6" (8" also possible).
Features:
Applications:
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