Lithography System

Mutech micro systems micro Aligner is a compact high value UV mask aligner designed for micro fabrication applications.It allows for easy fabrication of multi layer devices on a multitude of photo resists, with excellent exposure quality.
The easy to use, 7 inch touchscreen based control allows the user to align using the calibrated digital microscope and the X-Y-R micrometer based alignment stage.
The fully electronic wafer pressure and gap control allows for easy alignment and very high repeatability of the exposure conditions between processes.
Main applications The micro Aligner is ideal for the fabrication of high level systems for research applications. Main applications range from micro fluidics, optics and biotechnology to microelectronic devices. It provides the user with fast multi layer device fabrication capabilities thanks to its high resolution and high accuracy alignment.

Mutech micro systems micro exposer is a High Value UV exposing system designed for microfabrication applications.It allows the user to perform fast lithography processes on samples and substrates.
The system consists of an UV 365 nm parallel LED light source and a sliding tray where you can put your photo lithography mask and sample to expose.
A variety of custom holders and customization can be provided for your application.
Main applications The micro exposeris a robust system (all metal body structure), especially designed for easy use, low maintenance requirements and fast single layer device fabrication. Custom sample holders can be ordered for special substrates and samples, such as not flat or flexible substrates. The micro exposer is ideal for scaling from lab fabrication to low volume commercial production.